Nikon NEXIV VMZ-R3020
Magnification, AF and illumination conditions can be finely adjusted for each specimen. VMZ-R3020 offers a 300 x 200 mm stroke suitable for measurement of small components such as mechanical parts, molded parts and high-density PCBs.
– Six types of optical zooming head
– Detection of 0.1 mm transparent layer
– 8-segment ring illumination with three incident angles
– High measuring accuracy
– Faster throughput
– 15x high-speed zoom
Benefits & features
Standard magnification zooming heads: type 1 – 3
Type 1, 2 and 3, have Nikon 15× zoom optics with a long working distance, wide FOV and a high NA 0.35. They come with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with three incident angles.
High magnification zooming heads: type 4, TZ
Type 4 and TZ have Nikon 15× and 120× zoom optics with higher magnification and a higher NA 0.46. Type 4 comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with a 50-degree incident angle. TZ has LED episcopic, diascopic (for higher magnification) and darkfield illuminators.
Wide field-of-view zooming head: type A
Type A features Nikon 10× zoom optics with the widest FOV, the longest working distance and the highest NA 0.11. It comes with LED episcopic and diascopic illuminators, as well as an LED 8-segment ring illuminator with an 18-degree incident angle.
Detection of 0.1 mm transparent layer
Designed to detect the surfaces of thin transparent materials, the new TTL Laser AF works with the same high speed and high accuracy as the VMR series Laser AF.
8-segment ring illumination with three incident angles
Standard magnification zooming heads (type 1-3) come with 8-segment LED inner and outer ring illuminators as well as episcopic and diascopic illuminators. Incident angles of 37, 55 and 75 degrees, illumination directions by combining any 8-segment lights and light intensity can be adjusted.
Stroke (X Y Z): 300 x 200 x 200 mm (11.8 x 7.8 x 7.8 in.) 250 x 200 x 200 mm (9.8 x 7.8 x 7.8 in.) (with type TZ at low magnification)
Minimum readout: 0.01 µm
Maximum workpiece weight: 20 kg (44.1 lb.)
Measuring uncertainty: EUX,MPE EUY,MPE: 1.2+4L/1000 μm EUXY, MPE: 2+4L/1000 μm
Z measurement uncertainty: EUZ,MPE: 1.2+5L/1000 μm (with Laser AF)
Camera: Black & white 1/3” CCD, Color 1/3” CCD (option)* *For type 1, 2 and A only
Working distance: Type 1/2/3: 50 mm (with 37° illumination), 36 mm (with 55° illumination), 10 mm (with 78° illumination) Type 4: 30 mm Type TZ: 11 mm with the main objective lens and 32 mm with the left objective lens Type A: 73.5mm (63 mm with laser AF)
Magnification vs. field of view: Type 1: 0.5 – 7.5x / 9.33 x 7 – 0.622 x 0.467 mm Type 2: 1 – 15x / 4.67 x 3.5 – 0.311 x 0.233 mm Type 3: 2 – 30x / 2.33 x 1.75 – 0.155 x 0.117 mm
Type 4: 4 – 60x / 1.165 x 0.875 – 0.07 x 0.068 mm
Type TZ: 1 – 120x / 4.67 x 3.5 – 0.039 x 0.029 mm
Type A: 0.35 – 3.5x / 13.3 x 10 – 1.33 x 1 mm
Auto focus: Type 1, 2, 3, 4 and TZ come with TTL laser AF and vision AF. Type A comes with vision AF as standard and with laser AF as an option.
Illumination: Type 1/2/3: LED episcopic and diascopic illuminators, 8-segment LED inner and outer ring illuminators (37 degree incident angle with inner ring and 55 and 78 degree incident angles with outer ring)
Type TZ: LED episcopic, diascopic (for main objective lens) and darkfield illuminators
Type 4/A: LED episcopic and diascopic illuminators, 8-segment LED ring illuminator (with oblique angle of 50 degree: type 4, 18 degree: type A)
Power source: AC 100-240V 50/60Hz
Power consumption: 5A-2.5A
Dimensions & weight (W x D x H): Main unit & table: 700 x 730 x 1795 mm / 245 kg (27.5 x 28.7 x 70.6 in. / 540lb.) Controller: 190 x 450 x 440 / 15 kg (7.5 x 17.7 x 17.3 in. / 33 lb.)
Footprint: 2100 x 1100 mm