200mm Semiconductor Wafer Inspection
One of the most challenging problem in semiconductor wafer inspection is the handling of the wafer itself. The wafers are very sensitive item which undergoes many chemical processing and handling them by hand are prohibited. Therefore, the wafers are normally handled by wafer loader. The Nikon NWL 200 system integrates the L200N wafer inspection microscope with a wafer loader to inspection the wafers. For more sophisticated application, there is the Nikon Optistation OST3000 series to inspect the wafers. In this case, the microscope is integrated into one complete system including mini environment and inspection is done automatically or semi automatically.