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Bruker EDS

Scanning_Electron_Microscope_Bruker_EDS
Overview
Adding EDS to your Tabletop SEM turns it into a very powerful analytical tool allowing a multitude of capabilities using advanced microanalysis features for elemental analysis. With the conical pole piece design of the SNE-3200 and SNE-4500, the EDS signal is collected at the optimal solid angle unlike other tabletop SEM designs that have a flat or near-flat construction for the pole piece (electron beam exit to the sample chamber).
 
Application:
– Nano Science
– Semiconductor
– Automobile
– Chemistry
– Electronics
 
Hardware
High speed embedded type SDD Dectector (No LN2 required)
Energy resolution: Less than 129 eV (at Mn Ka)
Detector area: 30mm
Element detection range: B(5) – Am(95)
Maximum input count rate: > 150 kcps
Software: Qualitative or Quantitative Analysis
Analysis Modes: Point, Circle, Polygon, Line Scan, Mapping
 
Software
Point / Area Composition
The software has easy to use features for Composition Analysis at Points, Rectangles, Circles and Polygons. It provides fast and accurate qualitative or quantitative analysis with calibration capability. Enhanced Deconvolution capabilities greatly improve quantified results.
SEM_Bruker_EDS_point_Area_1
SEM_Bruker_EDS_point_Area_2
SEM_Bruker_EDS_point_Area_3
Mapping
The system provide fast and high resolution mapping analysis. Mapping provides the function of analyzing the distribution of elements and maps of individual element distribution can be broken out and saved separately. The spectra for each pixel are saved in a database for later recall and manipulation of point or line scan analysis. There are various user settings for saving formats, colors, depth, filters, and more.
SEM_Bruker_EDS_mapping_1
SEM_Bruker_EDS_mapping_2
Line Scan
– Draw ROI (region of interest) with a line and analyze elements along that line
– Easy to compare the elemental difference along ROI with line profile graph
– Very useful for cross-section thickness analysis of multi-layer samples including the mixing zone
– Various user settings for saving formats, colors, line scan width, filters and more
SEM_Bruker_EDS_line_scan_1
SEM_Bruker_EDS_line_scan_2

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