Overview
Phoenix is the high-end 3D surface metrology for most demanding measuring tasks on complex surfaces.
 
Key Features:
Highest optical and digital resolution
Diffraction limited imaging
Reliable technology
ISO compliant roughness values
Non-contact measurements
Maintenance-free and robust

Benefits & features

Precise 3D Inspection
Polaris 3D surface measuring system from Solarius enables highly accurate and precise 3D imaging of surfaces. The Polaris offers a cost effective variant for many applications. The Polaris Plus expands the scope of application due to its extensive equipment, which supports in particular simple automation of the measurement tasks.

Reliable technology
The Solarius Polaris 3D measuring system is based on the spinning disc confocal technique, proven over many years. In the design and calculation of the optics, great importance was attached to a physically optimal diffraction limitation ofthe optical system, which allows for accurate, precise and repeatable lateral measurements even in structural areas far below one micrometer.

Flatness and Straightness Measurement

Volume Measurement

Surface Defects Inspection Measurement

Technical Specifications
Sensor Types: Confocal area sensors Interferometric area sensors
Lateral Working Range: 150 mm x 150 mm
Vertical Working Range: 400 µm to 100 mm
Lateral Resolution: 70 nm up
Vertical Resolution: 0.1 nm up
Scope of Delivery: Sensor accordingly to specification, System PC and control unit, Solar ScanNT software, Win10 x64, Solar Map data analysis software