Overview
The NEXIV VMZ-H3030 achieves measurement at the highest precision of the NEXIV series, as well as advanced usability and performance.
 
Key Benefits:
– 5 types of optical zooming systems
– 8-segment ring illuminator with three incident angles
– Easy to use, streamlined software
– Highest measurement precision
– Advanced usability and performance
 
Applications:
– Mechanical parts (household and automotive)
– PCBs
– Molds
– Electronic parts
– High density package substrate (line, width, height)
– Wafer pattern (WLP, bump height, rewiring mask, MEMS mask)

Benefits & features

Zooming heads
5 types of optical zoom systems. Type 1, 2, and 3 provide clear and low distortion image and high N. Type 4 and TZ are designed to cover high magnification, 5 types are available to choose from to cover different fields of view and resolution requirements.

8-segment ring illumination with three incident angles
The three different angles allow the ring illuminator to accurately capture edges. All illuminations employ white LED and provide stability and long life.

Software
Easy to use, streamlined software. Provides enhanced ease of use with the customizable GUI and versatility based on Nikon’s years of extensive experience in developing the NEXIV series.

Specifications
 
Stroke (X Y Z): 300x300x150 mm
Minimum readout: 0.01 µm
Maximum workpiece weight: 30 kg (Accuracy guaranteed: 10 kg)
Maximum permissible error (for samples under 20 kg): EUX,MPE EUY,MPE: 0.6+2L /1000 μm, EUXY,MPE: 0.9+3L /1000 μm, EUZ,MPE: 0.9+L /150 μm
Accuracy guaranteed temperature: 20 °C ± 0.5 K
Maximum driving speed XY, Z: 100 mm/s, 50 mm/s
Minimum driving speed XY, Z: 0.01 mm/s , 0.001 mm/s
Camera: VGA 1/3“ B/W, Color, XGA 1/3“ B/W, Color *Color camera option is available only with Type 1, 2 and 3.
Working distance: Type 1, 2, 3: 50 mm (10 mm when using 75 degree LED illumination) / Type 4: 30 mm / Type TZ: 31 mm (low magnification), 11 mm (high magnification)
Magnification vs. field of view: Type 1: 0.5 – 7.5x / 9.33 x 7 – 0.622 x 0.467 mm Type 2: 1 – 15x / 4.67 x 3.5 – 0.311 x 0.233 mm Type 3: 2 – 30x / 2.33 x 1.75 – 0.155 x 0.117 mm
Type 4: 4 – 60x / 1.165 x 0.875 – 0.07 x 0.068 mm
Type TZ: 1 – 120x / 4.67 x 3.5 – 0.039 x 0.029 mm
Type A: 0.35 – 3.5x / 13.3 x 10 – 1.33 x 1 mm
Auto focus: TTL Laser AF/Image AF
Power source: AC 100-240V 50/60Hz
Power consumption: 5A-2.5A
Dimensions & weight (W x D x H): Main unit & table: 700 x 730 x 1795 mm / 245 kg (27.5 x 28.7 x 70.6 in. / 540lb.) Controller: 190 x 450 x 440 / 15 kg (7.5 x 17.7 x 17.3 in. / 33 lb.)
Footprint: 3000 x 2800 mm